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Publikováno v:
Laser/Optical Processing of Electronic Materials.
Laser writing of high quality metal interconnects has been demonstrated by several authors. However, the use of this technique for customizing integrated circuits (ICs) has been very limited. One significant problem has been the contact resistance be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fa9e9198ec589fe408322c5ae4707b04
https://doi.org/10.1117/12.963993
https://doi.org/10.1117/12.963993
