Zobrazeno 1 - 3
of 3
pro vyhledávání: '"SungMin Sim"'
Publikováno v:
Micromachines, Vol 12, Iss 8, p 998 (2021)
In this study, a micromachined chip in Otto configuration with multiple air-gaps (1.86 μm, 2.42 μm, 3.01 μm, 3.43 μm) was fabricated, and the resonance characteristics for each air-gap was measured with a 980 nm laser source. To verify the variab
Externí odkaz:
https://doaj.org/article/ec4550a8926244d5a146da896597c20f
Publikováno v:
The Korea Educational Review. 27:257-280
Publikováno v:
Micromachines
Volume 12
Issue 8
r-CTTC. Repositorio Institucional Producción Científica del Centre Tecnològic de Telecomunicacions de Catalunya (CTTC)
Universitat Oberta de Catalunya (UOC)
Micromachines, Vol 12, Iss 998, p 998 (2021)
Volume 12
Issue 8
r-CTTC. Repositorio Institucional Producción Científica del Centre Tecnològic de Telecomunicacions de Catalunya (CTTC)
Universitat Oberta de Catalunya (UOC)
Micromachines, Vol 12, Iss 998, p 998 (2021)
In this study, a micromachined chip in Otto configuration with multiple air-gaps (1.86 µm, 2.42 µm, 3.01 µm, 3.43 µm) was fabricated, and the resonance characteristics for each air-gap was measured with a 980 nm laser source. To verify the variab