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Autor:
Cheng-Hui Chou, Hsueh-Chun Liao, Ruey-Dar Chang, Sz-Kai Huang, Sung-Hung Lin, Jui-Chang Lin, Jung-Ruey Tsai
Publikováno v:
2016 International Conference on Microelectronic Test Structures (ICMTS).
This work focuses on the development of a novel test structure to evaluate the dynamic behavior of electrical characteristics in the boron-implanted germanium samples during the solid phase epitaxial regrowth (SPER) at low temperature annealing of 36
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ae45070c89daacdc84566f8263ab59e1
https://doi.org/10.1109/icmts.2016.7476200
https://doi.org/10.1109/icmts.2016.7476200
