Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Sung H. Won"'
Publikováno v:
ECS Transactions. 8:229-234
To assess the future prospects of displays on alternative substrates one need to consider that the active electronics required to address large displays is never fabricated on the substrate but always on an deposited film. The compatibility of this i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::57fc35f39775a2d36a2dead1f7614c7d
https://doi.org/10.1149/1.2767313
https://doi.org/10.1149/1.2767313
Publikováno v:
MRS Proceedings. 685
Polycrystalline silicon thin films have been deposited by an inductively coupled plasma chemical vapor deposition using SiH4/H2 mixtures. The quality of poly-Si can be improved by increasing RF power and hydrogen dilution ratio. The poly-Si deposited
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b3c7b8892163fc63857f645c9fe4cf0
https://doi.org/10.1557/proc-685-d5.2.1
https://doi.org/10.1557/proc-685-d5.2.1