Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Suneeta Neogi"'
A Transmission X-ray Microscope (TXM) for Non-destructive 3D Imaging of ICs at Sub-100 nm Resolution
Autor:
David Trapp, Suneeta Neogi, Christopher Kelly, Casey Bennet, Frederick William Duewer, Kenneth W. Nill, Souping Yan, Markus Kuhn, David Scott, Peter Coon, Steve Wang, Wenbing Yun, Shashidar Kamath, Alan Lyon
Publikováno v:
International Symposium for Testing and Failure Analysis.
Xradia has developed a laboratory table-top transmission x-ray microscope, TXM 54-80, that uses 5.4 keV x-ray radiation to nondestructively image buried submicron structures in integrated circuits with at better than 80 nm 2D resolution. With an inte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::343206f184a2dda2f0ddd654810acd6a
https://doi.org/10.31399/asm.cp.istfa2002p0227
https://doi.org/10.31399/asm.cp.istfa2002p0227
Publikováno v:
Volume 2: Aircraft Engine; Marine; Microturbines and Small Turbomachinery.
The effect of thermal soaking on the mechanical properties of a candidate material for advanced heat engine applications namely, hot isostatically pressed (HIPed) silicon nitride (GTEPY6) are reported here. Pure uniaxial tensile tests conducted at ro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3c1fa4df11988de3b025e52a9ea8c0e2
https://doi.org/10.1115/94-gt-397
https://doi.org/10.1115/94-gt-397