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pro vyhledávání: '"Sundiram P. Singh"'
Autor:
Luis Angelats-Silva, Maharaj S. Tomar, Sundiram P. Singh, Segundo R. Jáuregui-Rosas, Oscar Perales-Perez
Publikováno v:
MRS Proceedings. 1165
We report a systematic study of the influence of the target-substrate distance and rf power on the structural and optical properties of ZnO thin films grown by rf magnetron sputtering in Ar atmosphere from ZnO sputtering target. Sharp (002) peak show
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7d4291a6d84dc079ea860216cf4c7be2
https://doi.org/10.1557/proc-1165-m08-38
https://doi.org/10.1557/proc-1165-m08-38
