Zobrazeno 1 - 10
of 176
pro vyhledávání: '"Sunao Ishihara"'
Publikováno v:
Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol 4, Iss 5, Pp 948-954 (2010)
Small-sized structures of diamond-like carbon (DLC) deposited by FIB-CVD contain microscopic non-uniformity in their mechanical properties. This is mainly due to the structures containing Ga implanted by Ga ion irradiation during deposition [1]. In t
Externí odkaz:
https://doaj.org/article/210fc13e4c5e4f4fa6fa3f84fd21556f
Autor:
Akira ANDO, Masahiro OHSHIMA, Tsuyoshi SETOGUCHI, Sunao ISHIHARA, Yasuyuki YOKONO, Tetsuya NAGASAKA
Publikováno v:
Journal of JSEE. 70:1_86-1_91
Autor:
Sunao ISHIHARA
Publikováno v:
Journal of the Japan Society for Precision Engineering. 86:953-953
Autor:
Sunao ISHIHARA
Publikováno v:
Journal of the Japan Society for Precision Engineering. 86:874-874
Publikováno v:
Science and Technology of Advanced Materials, Vol 10, Iss 3, p 034501 (2009)
Nanoelectromechanical devices, which can be used as nanotools in nanofactories, were fabricated by focused ion beam chemical vapor deposition (FIB-CVD). The devices are made of diamond-like carbon (DLC), deposited on a Si substrate using gasified phe
Externí odkaz:
https://doaj.org/article/f04aa514b74248f38a8ca5b21d5f0bd7
Publikováno v:
Science and Technology of Advanced Materials, Vol 10, Iss 3, p 030301 (2009)
Microelectromechanical systems (MEMS) are widely used small electromechanical systems made of micrometre-sized components. Presently, we are witnessing a transition from MEMS to nanoelectromechanical systems (NEMS), which comprise devices integrating
Externí odkaz:
https://doaj.org/article/bc2a22ebb6ce479390f17a575a729d12
Publikováno v:
Journal of Photopolymer Science and Technology. 25:33-36
Publikováno v:
Journal of Photopolymer Science and Technology. 25:37-42
Publikováno v:
Journal of Micro-Nano Mechatronics. 6:89-95
Microrobots have been investigated in recent years with the objective of discovering applications in the biomedical industry. The selective control of multiple microrobots is a challenging task; however, such control would allow for the dexterous man
Publikováno v:
Microelectronic Engineering. 87:1044-1048
In this study, we examined the potential of real-time monitoring for the detection of structural defects such as deposits on substrates formed during the three-dimensional (3D) nano- and micro-structure fabrication by focused-ion-beam chemical vapor