Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Sun Wook Ko"'
Autor:
Kummi Oh, Sun-Wook Ko, Deuk-Ho Yeon, Tae-Hyoung Moon, Kwon-Shik Park, Jeom-Jae Kim, Soo-Young Yoon
Publikováno v:
SID Symposium Digest of Technical Papers. 53:314-317
Publikováno v:
Journal of nanoscience and nanotechnology. 15(10)
In this paper, we report the effects of O2-plasma treatment on the reliability and electrical properties of indium tin zinc oxide (ITZO) films. Excellent electrical properties, including a saturation mobility (μsat) of ∼20.2 cm2/V · s, a threshol