Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Suk-Kyun Kim"'
Autor:
Jongsu Lee, Kangjoon Seo, Inhwan Lee, Byounghoon Lee, Hyosang Kang, Sunyoung Koo, Kyu-Young Kim, Yoonsuk Hyun, Suk-Kyun Kim, Seo-Min Kim, Myoung-Soo Kim
Publikováno v:
Extreme Ultraviolet (EUV) Lithography IV.
ASML NXE3100 has been introduced for EUV Pre-Production, and ASML NXE3300 for High Volume Manufacturing will be installed from this year. EUV mask defect control is the one of the concerns for introducing EUVL to device manufacturing, for current EUV
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f9d9b477211241b135565a8fe5642bcc
https://doi.org/10.1117/12.2010091
https://doi.org/10.1117/12.2010091
Autor:
Munsik Kim, Byoung-Ho Nam, Donggyu Yim, Yoonsuk Hyun, Changreol Kim, Byoung-Sub Nam, Yongdae Kim, Cheol-Kyun Kim, Yongkyoo Choi, Suk-Kyun Kim, James Moon, Chang-Moon Lim
Publikováno v:
Alternative Lithographic Technologies.
One of the major issues introduced by development of Extreme Ultra Violet Lithography (EUV) is high level of flare and shadowing introduced by the system. Effect of the high level flare degrades the aerial images and may introduce unbalanced Critical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b77fb627922faf287c56c9ad2f38c7b0
https://doi.org/10.1117/12.814364
https://doi.org/10.1117/12.814364
Autor:
Tae-Seung Eom, Jun-Taek Park, Chang-Moon Lim, Sungki Park, Byung-Ho Nam, Yoonsuk Hyun, Changreol Kim, Keundo Ban, Changil Oh, Sunyoung Koo, Hyeong-Soo Kim, Suk-Kyun Kim, Sarohan Park, Seung-Chan Moon, Hyunjo Yang
Publikováno v:
Alternative Lithographic Technologies.
In the field of lithography technology, EUV lithography can be a leading candidate for sub-30 nm technology node. EUVL expose system has different characteristics compared to DUV exposure system. EUV source wavelength is short and no material is tran
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fcbd3de0e668979002b6ce1a91b27b88
https://doi.org/10.1117/12.814407
https://doi.org/10.1117/12.814407
Publikováno v:
The Korean journal of hepatology. 10(3)
Most cases of hepatitis B virus (HBV) are transmitted vertically in endemic areas of HBV. The positivity of serum HBeAg/HBV DNA in pregnant women is associated with vaccine failure. Recently, a national program for HBV vaccines free of charge in neon
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::439242726b8254cd762c7af84e394538
https://pubmed.ncbi.nlm.nih.gov/15385713
https://pubmed.ncbi.nlm.nih.gov/15385713