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pro vyhledávání: '"Suejin Cho"'
Autor:
Yasutsugu Usami, Suejin Cho, Mitsunori Numata, Yusin Yang, Yong-Deok Jeong, Mitsuhiro Togashi, Harutaka Sekiya
Publikováno v:
SPIE Proceedings.
The shrinking of design rule requires the short wavelength light used in the optical inspection system. However, the existence of the condition that the long wavelength light becomes effective for the defect detection in line/space structure is known
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3f7ce1b1dfaae1fb8c5a5d84c33f0047
https://doi.org/10.1117/12.916267
https://doi.org/10.1117/12.916267
