High-rate deposition of cBN films by ion-beam-assisted vapor deposition.

Autor: Sueda, Minoru, Kobayashi, Toshiro, Rokkaku, Tadashi, Ogawa, Makoto, Watanabe, Toshiya, Morimoto, Satoshi

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1998, Vol. 16 Issue 6, p3287-3294, 8p