Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Sudharshanaraj Thiruppathiraj"'
Autor:
Rakesh Ranjan, Anand Karpatne, Naveen Raj, Sudharshanaraj Thiruppathiraj, Douglas Breden, Laxminarayan Raja
Publikováno v:
2022 IEEE International Power Modulator and High Voltage Conference (IPMHVC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d7c40162a3089d35aef223c981dd7b97
https://doi.org/10.1109/ipmhvc51093.2022.10099395
https://doi.org/10.1109/ipmhvc51093.2022.10099395
Autor:
Rakesh Ranjan, Sudharshanaraj Thiruppathiraj, Naveen Raj, Anand Karpatne, Douglas Breden, Laxminarayan Raja
Publikováno v:
SAE Technical Paper Series.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ec0b46d2f346f25ab011f392a0b0e8a0
https://doi.org/10.4271/2022-01-0728
https://doi.org/10.4271/2022-01-0728
Publikováno v:
Journal of Vacuum Science & Technology A. 39:052404
Atomic layer deposition (ALD) using multiwafer batch reactors has now emerged as the manufacturing process of choice for modern microelectronics at a massive scale. Stringent process requirements of thin film deposition uniformity within wafer (WiW)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fdaa660e7708b2ae98c7ee34f89f6ae6
https://doi.org/10.1116/6.0000993
https://doi.org/10.1116/6.0000993