Zobrazeno 1 - 10
of 21
pro vyhledávání: '"Subramany, Lokesh"'
Autor:
Subramany, Lokesh
Publikováno v:
Masters Theses 1911 - February 2014
Optical Proximity Correction (OPC) is a part of a family of techniques called Resolution Enhancement Techniques (RET). These techniques are employed to increase the resolution of a lithography system and improve the quality of the printed pattern. Th
Externí odkaz:
https://scholarworks.umass.edu/theses/721
https://scholarworks.umass.edu/context/theses/article/1804/viewcontent/auto_convert.pdf
https://scholarworks.umass.edu/context/theses/article/1804/viewcontent/auto_convert.pdf
Autor:
Yun Tao Jiang, Mark Yelverton, Shyam Pal, Subramany Lokesh, Yayi Wei, Bumhwan Jeon, Sohan Singh Mehta, Chen Li
Publikováno v:
SPIE Proceedings.
Advanced thermal annealing processes used for transistor enhancing for the state of the art process nodes induce wafer grid deformations. RTA (Rapid Thermal Anneal) and LSA (Laser Scanning Anneal) processes are a few examples. High Order Wafer Alignm
Autor:
Subramany, Lokesh, Chung, Woong Jae, Gutjhar, Karsten, Garcia-Medina, Miguel, Sparka, Christian, Yap, Lipkong, Demirer, Onur, Karur-Shanmugam, Ramkumar, Riggs, Brent, Ramanathan, Vidya, Robinson, John C., Pierson, Bill
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC); 2015, p324-328, 5p
Autor:
Erdmann, Andreas, Kye, Jongwook, Samudrala, Pavan, Chung, Woong Jae, Subramany, Lokesh, Gao, Haiyong, Aung, Nyan, Oh, Seung Chul, Lee, Shawn, Delvigne, Erik, Minghetti, Blandine
Publikováno v:
Proceedings of SPIE; March 2017, Vol. 10147 Issue: 1 p101471U-101471U-6, 913246p
Autor:
Erdmann, Andreas, Kye, Jongwook, Samudrala, Pavan, Hart, Gregory, Chen, Yen-Jen, Subramany, Lokesh, Gao, Haiyong, Aung, Nyan, Chung, Woong Jae, Minghetti, Blandine, Mali, Rajan, Khikhlovskyi, Seva, Heres, Pieter
Publikováno v:
Proceedings of SPIE; March 2017, Vol. 10147 Issue: 1 p101471T-101471T-7, 913247p
Autor:
Sanchez, Martha I., Ukraintsev, Vladimir A., Gao, Haiyong, Chung, Woong Jae, Aung, Nyan, Subramany, Lokesh, Samudrala, Pavan, Gomez, Juan-Manuel
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782Q-97782Q-8, 880047p
Autor:
Sanchez, Martha I., Ukraintsev, Vladimir A., Aung, Nyan L., Chung, Woong Jae, Subramany, Lokesh, Hussain, Shehzeen, Samudrala, Pavan, Gao, Haiyong, Hao, Xueli, Chen, Yen-Jen, Gomez, Juan-Manuel
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782G-97782G-7, 880046p
Autor:
Sanchez, Martha I., Ukraintsev, Vladimir A., Subramany, Lokesh, Chung, WoongJae, Samudrala, Pavan, Gao, Haiyong, Aung, Nyan, Gomez, Juan Manuel, Gutjahr, Karsten, Park, DongSuk, Snow, Patrick, Garcia-Medina, Miguel, Yap, Lipkong, Demirer, Onur Nihat, Pierson, Bill, Robinson, John C.
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97782K-97782K-10, 9680429p
Autor:
Sanchez, Martha I., Ukraintsev, Vladimir A., Subramany, Lokesh, Chung, Woong Jae, Samudrala, Pavan, Gao, Haiyong, Aung, Nyan, Gomez, Juan Manuel, Minghetti, Blandine, Lee, Shawn
Publikováno v:
Proceedings of SPIE; March 2016, Vol. 9778 Issue: 1 p97780U-97780U-7, 880028p
Autor:
Wallow, Thomas I., Hohle, Christoph K., Mehta, Sohan S., Ganta, Lakshmi K., Chauhan, Vikrant, Wu, Yixu, Singh, Sunil, Ann, Chia, Subramany, Lokesh, Higgins, Craig, Erenturk, Burcin, Srivastava, Ravi, Singh, Paramjit, Koh, Hui Peng, Cho, David
Publikováno v:
Proceedings of SPIE; March 2015, Vol. 9425 Issue: 1 p94250B-94250B-11, 9330762p