Zobrazeno 1 - 10
of 21
pro vyhledávání: '"Steven J. Haney"'
Autor:
Obert R. Wood, William C. Sweatt, Kurt W. Berger, W. K. Waskiewicz, Daniel A. Tichenor, Donald Lawrence White, Richard H. Stulen, Richard R. Freeman, Marc D. Himel, David L. Windt, Jeffrey Bokor, Steven J. Haney, John E. Bjorkholm, L. A. Brown, Glenn D. Kubiak, Donald M. Tennant, William M. Mansfield, Tanya E. Jewell, Alastair A. MacDowell, Michael E. Malinowski
Publikováno v:
Applied optics. 32(34)
Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterize
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::049349f21fda670c0a21a5de2505210f
https://pubmed.ncbi.nlm.nih.gov/20856569
https://pubmed.ncbi.nlm.nih.gov/20856569
Autor:
Donald Lawrence White, Richard R. Freeman, Donald M. Tennant, William M. Mansfield, Michael E. Malinowski, Daniel A. Tichenor, L. A. Brown, Richard H. Stulen, Steven J. Haney, Kurt W. Berger, W. K. Waskiewicz, John E. Bjorkholm, Obert R. Wood, David L. Windt, Alastair A. MacDowell, Tanya E. Jewell, Glenn D. Kubiak, Jeffrey Bokor
Publikováno v:
Optics letters. 16(20)
Projection imaging of 0.1-microm lines and spaces is demonstrated with a Mo/Si multilayer coated Schwarzschild objective and 14-nm illumination from a laser plasma source. This structure has been etched into a silicon wafer by using a trilevel resist
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c1acabfa8efa5e3659c1e1c25660a731
https://pubmed.ncbi.nlm.nih.gov/19777030
https://pubmed.ncbi.nlm.nih.gov/19777030
Autor:
Pamela K. Barr, John E. M. Goldsmith, Henry N. Chapman, Eric M. Panning, Sang Hun Lee, Louis J. Bernardez, William C. Replogle, Patrick P. Naulleau, Daniel A. Tichenor, W. P. Ballard, Stefan Wurm, Donna J. O'Connell, Karen L. Jefferson, Steven J. Haney, Terry A. Johnson, Alvin H. Leung
Publikováno v:
SPIE Proceedings.
Static and scanned images of 100nm dense features for a developmental set of l/14 optics (projection optics box # 1, POB 1) in the Engineering Test Stand (ETS) were successfully obtained with various LPP source powers last year. The ETS with POB1 has
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ec1351a2eae2c26b522da8c94dc27619
https://doi.org/10.1117/12.484967
https://doi.org/10.1117/12.484967
Autor:
Karen L. Jefferson, Richard J. Anderson, Mark D. Zimmerman, Philip A. Grunow, J. Taylor, Patrick P. Naulleau, Alvin H. Leung, Pamela K. Barr, Richard H. Campiotti, E. M. Gullikson, Tony G. Smith, Leonard E. Klebanoff, Layton C. Hale, Henry N. Chapman, R. Lafon, Kenneth A. Goldberg, Sang Hun Lee, Joel R. Darnold, Yon E. Perras, William C. Replogle, Samuel Ponti, Steven J. Haney, John B. Wronosky, Terry A. Johnson, Kenneth A. Williams, Daniel A. Tichenor, Harry Shields, Therese L. Porter, James L. Van De Vreugde, Daniel L. Knight, W. P. Ballard, Luis J. Bernardez, Donna J. O'Connell, Randall J. St. Pierre, Dean A. Buchenauer, Kenneth L. Blaedel, Samuel Graham, G. E. Sommargren
Publikováno v:
SPIE Proceedings.
Full-field imaging with a developmental projection optic box (POB 1) was successfully demonstrated in the alpha tool Engineering Test Stand (ETS) last year. Since then, numerous improvements, including laser power for the laser-produced plasma (LPP)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::70d0f48bae34ecc0bda1359d98956942
https://doi.org/10.1117/12.482791
https://doi.org/10.1117/12.482791
Autor:
Leonard E. Klebanoff, Samual Graham, Alvin H. Leung, Steven J. Haney, Philip A. Grunow, W. Miles Clift
Publikováno v:
Emerging Lithographic Technologies VI.
The EUV Engineering Test Stand (ETS) has demonstrated the printing of 100 nm resolution scanned images. This milestone was achieved with the ETS operating in an initial low-power configuration using a 40 W laser combined with a Xe cluster jet. The th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a47f2d4d38253a4449f07ce4f4917491
https://doi.org/10.1117/12.472304
https://doi.org/10.1117/12.472304
Autor:
Eric M. Gullikson, David Attwood, Donald W. Sweeney, Alvin H. Leung, Luis J. Bernardez, Guojing Zhang, William P. Ballard, Karen L. Jefferson, Patrick P. Naulleau, Eric M. Panning, Henry N. Chapman, Steven J. Haney, Terry A. Johnson, Kenneth A. Goldberg, Stefan Wurm, Daniel A. Tichenor, Pei-yang Yan, William C. Replogle, Donna J. O'Connell, John E. M. Goldsmith, Kenneth L. Blaedel, Glenn D. Kubiak, Charles W. Gwyn, John B. Wronosky, J. E. Bjorkholm, Sang Hun Lee
Publikováno v:
Emerging Lithographic Technologies VI.
Static and scanned images of 100 nm dense features were successfully obtained with a developmental set of projection optics and a 500W drive laser laser-produced-plasma (LPP) source in the Engineering Test Stand (ETS). The ETS, configured with POB1,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::84d7aea6c6034f7debe6f1d7537b290c
https://doi.org/10.1117/12.472300
https://doi.org/10.1117/12.472300
Autor:
W. Miles Clift, Chip Steinhaus, Leonard E. Klebanoff, Philip A. Grunow, Alvin H. Leung, Michael E. Malinowski, Steven J. Haney
Publikováno v:
SPIE Proceedings.
The first environmental data from the Engineering Test Stand (ETS) has been collected. Excellent control of high-mass hydrocarbons has been observed. This control is a result of extensive outgas testing of components and materials, vacuum compatible
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::539c359a8e65be1572de5e7cb13a43df
https://doi.org/10.1117/12.436676
https://doi.org/10.1117/12.436676
Autor:
Richard H. Stulen, Yon E. Perras, Rodney P. Nissen, Daniel A. Tichenor, John E. M. Goldsmith, Gregory Frank Cardinale, Kevin D. Krenz, Daniel R. Folk, Alfred A. Ver Berkmoes, Joel R. Darnold, John B. Wronosky, Tony G. Smith, Avijit K. Ray-Chaudhuri, Craig C. Henderson, Donna J. O'Connell, Karen J. Jefferson, Glenn D. Kubiak, Kurt W. Berger, Steven J. Haney, Luis J. Bernardez, Pamela K. Barr
Publikováno v:
SPIE Proceedings.
The Sandia EUV 10x microstepper system is the result of an evolutionary development process, starting with a simple 20x system, progressing through an earlier 10x system, to the current system that has full microstepper capabilities. The 10x microste
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7bd7f1a5a41445d287d2aff713ff8ddc
https://doi.org/10.1117/12.309570
https://doi.org/10.1117/12.309570
Autor:
C. Clay Widmayer, P. A. Renard, B. Ehrlich, Steven J. Haney, D. R. Speck, David Milam, Lynn G. Seppala, John A. Caird, Bruno M. Van Wonterghem, Jerome M. Auerbach, Calvin E. Thompson, Richard A. Sacks, Mark A. Henesian, Janice K. Lawson, Timothy L. Weiland, Wade H. Williams, Paul J. Wegner, Kenneth R. Manes, I.C. Smith, J. T. Hunt, John B. Trenholme
Publikováno v:
SPIE Proceedings.
An exhaustive set of Beamlet and Nova laser system simulations were performed over a wide range of power levels in order to gain understanding about the statistical trends in Nova and Beamlet`s experimental data sets, and to provide critical validati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2d8746bb8245a0ed0aee59416e228fa4
https://doi.org/10.1117/12.294244
https://doi.org/10.1117/12.294244
Autor:
Rodney P. Nissen, Obert R. Wood, Donald Lawrence White, Avijit K. Ray-Chaudhuri, Khanh B. Nguyen, Steven J. Haney, Donald M. Tennant, Richard H. Stulen, Yon E. Perras, Kurt W. Berger, Daniel A. Tichenor, Richard William Arling, Linus A. Fetter
Publikováno v:
SPIE Proceedings.
A laboratory extreme ultraviolet lithography tool (EUVL) has been assembled atSandia National Laboratories [1]. Its major components include a Schwarzschildcamera with 0.1 jim resolution integrated with a laser plasma source (LPS) and amagnetically l
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6b970c3aeb050735cab43694f9c7bbcd
https://doi.org/10.1117/12.240496
https://doi.org/10.1117/12.240496