Výsledky vyhledávání - "Steven Bilodeau"

Strained Germanium Gate-All-Around pMOS Device Demonstration Using Selective Wire Release Etch Prior to Replacement Metal Gate Deposition

Autor: Dan Mocuta, E. Chiu, Nadine Collaert, Roger Loo, Robert Langer, A. De Keersgieter, Paola Favia, Liesbeth Witters, Hiroaki Arimura, Frank Holsteyns, Farid Sebaai, Kathy Barla, E. Vancoille, Andreas Schulze, Tom Schram, V. De Heyn, Steven Bilodeau, Andriy Hikavyy, Peter Storck, Jerome Mitard, A. Opdebeeck, Katia Devriendt, Emanuel I. Cooper, Christa Vrancken, Ruben R. Lieten, Geert Eneman, Kurt Wostyn, Alexey Milenin, Niamh Waldron

Publikováno v: IEEE Transactions on Electron Devices. 64:4587-4593

Strained Ge p-channel gate-all-around (GAA) devices with Si-passivation are demonstrated on high-density 45-nm active pitch starting from 300-mm SiGe strain relaxed buffer wafers. While single horizontal Ge nanowire (NW) devices are demonstrated, the

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