Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Steven A. Smallwood"'
Publikováno v:
Surface and Coatings Technology. 201:2960-2969
The concept of replenishing lubrication provided by a pair of bound/mobile hydrocarbon-based lubricants has been extended to silicon-based MEMS in vacuum (∼ 1.3 × 10− 4 Pa). Several bound/mobile pairs of lubricants were evaluated to study the ef
Publikováno v:
Wear. 260:1179-1189
A MEMS electrostatic lateral output motor has been successfully coated with a diamond like carbon (DLC) coating to protect against wear. Experiments were performed to characterize coating chemistry and performance. Friction results from accelerated s
Publikováno v:
Journal of Microelectromechanical Systems. 14:954-960
The concept of a thin layer of mobile hydrocarbon-based lubricant providing protection by replenishment to a surface already protected by a chemically bound material has been explored for the first time, for application to silicon-based microelectrom
Autor:
Steven A. Smallwood, Steven T. Patton, K.C. Eapen, Josekutty J. Nainaparampil, Jeffrey S. Zabinski
Publikováno v:
Surface and Coatings Technology. 197:270-277
The aging of Fomblin Zdol® on a silicon-based MEMS device was investigated. The MEMS device used was an electrostatic lateral output motor. Devices freshly coated with Zdol performed exceedingly well compared to uncoated devices, but their performan
Publikováno v:
SPIE Proceedings.
ITT Exelis builds electro optical telescopes and uses an optical throughput model in spreadsheet form to determine the transmission degradation due to contamination. The model can also be used to determine allowable contamination given a transmission