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Autor:
Sam Subramanian, Jose Z. Garcia, Nelson Gomez, Steve Heineke, Kent Erington, Kris Dickson, Stefano Larentis, Khiem Ly, Tony Chrastecky
Publikováno v:
International Symposium for Testing and Failure Analysis.
As advanced silicon-on-insulator (SOI) technology becomes a more widespread technology offering, failure analysis approaches should be adapted to new device structures. We review two nanoprobing case studies of advanced SOI technology, detailing the