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Autor:
Zhigang Song, Tarl Gordon, Teng-Yin Lin, Kan Zhang, Neerja Bawaskar, Steve Crown, Yandong Liu, Martin O'tool, Kannan Sekar, Toni Laaksonen, Daniel Greenslit, Mark Lagus, Ishtiaq Ahsan, Bill Evans, Joerg Winkler, Shahrukh Khan, DK Sohn, Frank Barth, John Masnik
Publikováno v:
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Functional logic test structures with ATPG blocks and scan chains have been the traditional inline logic learning vehicle for technology learning and development. However, these test structures often need processing of wafers up to a higher BEOL proc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::af9c6803b34a79dc6e26839fa55284f7
https://doi.org/10.1109/asmc.2019.8791769
https://doi.org/10.1109/asmc.2019.8791769
