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Autor:
Terry Kruger, Gerald J. Lillquist, Yuri Cheburkov, Karrie S. Moorhouse, Yifan Zhang, Pat M. Savu, Carl R. Kessel, Steve Brinduse, Grant Birznieks, Thomas A. Kestner, Michael J. Parent, Michael C. Pallazzotto, William M. Lamanna
Publikováno v:
SPIE Proceedings.
A new class of ionic photo-acid generators (PAGs) useful in chemically amplified photoresist formulations has been developed. The new PAGs are salts comprising a photoactive cation and a fluoroorganic sulfonylimide or sulfonylmethide anion. These hig
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4d467f9bca4c90490cfdec71b4532a30
https://doi.org/10.1117/12.474284
https://doi.org/10.1117/12.474284
