Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Stephenie W. Butler"'
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 18:42-48
The polycrystalline silicon deposited by single-wafer rapid thermal chemical vapor deposition with both silane (SiH/sub 4/) and disilane (Si/sub 2/H/sub 6/) precursors have been characterized for across wafer uniformity, thickness repeatability, and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b127fa7dd8862673d8e3ccf07993921f
https://doi.org/10.1109/tsm.2004.841749
https://doi.org/10.1109/tsm.2004.841749
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 7:134-148
In this paper, we present an architecture for a run-to-run supervisory process control system that allows the engineer to tailor the form of control for specific processes. The architecture supports different degrees of control, from model-based cont
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f9673ed35694a6e52850e1ef413ba554
https://doi.org/10.1109/66.286850
https://doi.org/10.1109/66.286850