Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Stephen M. Ramey"'
Autor:
Rachael J. Parker, Jyothi Bhaskarr A. Velamala, Kuan-Yueh James Shen, David Johnston, Yao-Feng Chang, Stephen M. Ramey, Siang-Jhih Sean Wu, Padma Penmatsa
Publikováno v:
2023 IEEE International Reliability Physics Symposium (IRPS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::63dd8b8bad364673b2d5b75936d322d6
https://doi.org/10.1109/irps48203.2023.10118128
https://doi.org/10.1109/irps48203.2023.10118128
Publikováno v:
Silicon Nanoelectronics ISBN: 9781315220857
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::16f298288ba01aff0cef21db88271d2f
https://doi.org/10.1201/b19251-2
https://doi.org/10.1201/b19251-2
Autor:
G. A. Gruber, William H. Howland, Robert J. Hillard, Robert G. Mazur, Richard Siergiej, Stephen M. Ramey, S. Evseev
Publikováno v:
AIP Conference Proceedings.
A new metrology method has been developed for the monitoring of advanced gate dielectric processes associated with 0.1 μm technology. Unlike previous techniques that involved corona or Hg gate based methods, this technique measures all gate dielectr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c8ec7d1292d307981b26f55c90bac851
https://doi.org/10.1063/1.1354382
https://doi.org/10.1063/1.1354382