Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Stephen M. Preston"'
Publikováno v:
SPIE Proceedings.
Preliminary testing results for a new, commercially available soft x-ray proximity stepper are presented. Total system performance (i.e., overlay preci sion, alignment precision, and critical dimension control) is under investiga tion using elect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9965f1a777e92ca229ab20fb1371f497
https://doi.org/10.1117/12.968525
https://doi.org/10.1117/12.968525
Autor:
Anne S. Kaplan, David N. Tomes, Darryl W. Peters, Jerry Drumheller, Robert D. Frankel, Stephen M. Preston
Publikováno v:
SPIE Proceedings.
A broadly applicable lithography tool figure of merit will be presented and evaluated for present technologies. A comparison of the cost effectiveness of current lithographic technologies shows that a laser generated, soft x-ray plasma proximity step
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::59f86bc6341ecf543a379153477cc061
https://doi.org/10.1117/12.945630
https://doi.org/10.1117/12.945630