Zobrazeno 1 - 10
of 42
pro vyhledávání: '"Stephan Merzsch"'
Publikováno v:
2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).
This paper describes the strategy and methods deployed to overcome complexities at various analysis steps systematically in analyzing analog or mix-signal circuits within power ICs. Methods and strategies include: 1.) Building up of universal applica
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3380f04f99318f84643e247a55351436
https://doi.org/10.1109/ipfa.2018.8452180
https://doi.org/10.1109/ipfa.2018.8452180
Publikováno v:
Microelectronic Engineering. 145:96-103
Display Omitted We develop a handheld cantilever-based airborne nanoparticle detector (CANTOR-2).Main components of CANTOR-2 are described in details.CANTOR-2 is evaluated using carbon aerosols in typical workplace conditions.CANTOR-2 is calibrated w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4e3551b006922575fdc0552800026cd9
https://doi.org/10.1016/j.mee.2015.03.037
https://doi.org/10.1016/j.mee.2015.03.037
Publikováno v:
Micro & Nano Letters. 9:676-679
The fabrication and use of silicon nanowire (SiNW) array-patterned microcantilever sensors for enhancing aerosol mass detection are described. Surface modification of the cantilever is performed selectively by combining the processes of nanoimprint l
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1cab23105e664fab3a7fb5a67c3f7760
https://doi.org/10.1049/mnl.2014.0249
https://doi.org/10.1049/mnl.2014.0249
Autor:
Andreas Waag, Frederik Steib, Andrej Stranz, Peter Hinze, Stephan Merzsch, Thomas Weimann, Erwin Peiner, Hutomo Suryo Wasisto
Publikováno v:
Microsystem Technologies. 20:759-767
Silicon resonant sensors with large surface area-to-volume ratios provide high weighing sensitivity. This fact implies the possibility for detection of slight mass changes [i.e. by attached nanoparticles (NPs)]. Vertical silicon nanowire (SiNW) reson
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2e1dcd1460db0de3bf6c237577adf96e
https://doi.org/10.1007/s00542-013-2032-4
https://doi.org/10.1007/s00542-013-2032-4
Publikováno v:
Microsystem Technologies. 20:571-584
The potential use of nanoelectromechanical systems (NEMS) created in silicon nanopillars (SiNPLs) is investigated in this work as a new generation of aerosol nanoparticle (NP)-detecting device. The sensor structures are created and simulated using a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5ca521e67b4ae491a80ae2860f449bcf
https://doi.org/10.1007/s00542-013-1992-8
https://doi.org/10.1007/s00542-013-1992-8
Autor:
Hutomo Suryo Wasisto, Stephan Merzsch, Erik Uhde, Erwin Peiner, Andreas Waag, Tunga Salthammer, Andrej Stranz
Publikováno v:
Sensors and Actuators B: Chemical. 189:146-156
This work demonstrates mass measurement of airborne titanium dioxide (TiO2) engineered nanoparticles (ENPs) using silicon resonant nanopillar sensors by monitoring resonant frequency shifts induced by the mass of trapped ENPs. Inductively coupled pla
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e83f3e7b559fa2e7ff20909fccaa831f
https://doi.org/10.1016/j.snb.2013.02.053
https://doi.org/10.1016/j.snb.2013.02.053
Publikováno v:
Microsystem Technologies. 20:559-569
A closed-loop circuit is developed in this work for tracking the resonant frequency of silicon microcantilever mass sensors. The proposed closed-loop system is mainly based on a phase-locked loop (PLL) circuit. To lock onto the resonant frequency of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a2487cecb3c4ab0b08d2f03e199569ee
https://doi.org/10.1007/s00542-013-1991-9
https://doi.org/10.1007/s00542-013-1991-9
Autor:
Tunga Salthammer, Hutomo Suryo Wasisto, Stephan Merzsch, Andreas Waag, Erwin Peiner, Erik Uhde
Publikováno v:
Sensors and Actuators A: Physical. 202:90-99
Photoresist-based nanoparticle (NP) removal is evaluated as an approach to extend the life time of silicon resonant cantilever-based mass sensors for airborne NP monitoring. Integrated with a miniaturized electrostatic NP sampler, the cantilever can
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3488544d89e65547340bd8b7d90c8f5f
https://doi.org/10.1016/j.sna.2012.12.016
https://doi.org/10.1016/j.sna.2012.12.016
Autor:
Tunga Salthammer, Hutomo Suryo Wasisto, Andrej Stranz, Erik Uhde, Andreas Waag, Erwin Peiner, Stephan Merzsch
Publikováno v:
Micro & Nano Letters. 8:554-558
Vertically aligned silicon nanowire (SiNW)-based resonators were fabricated and utilised to detect aerosol nanoparticles (NPs) by measuring their resonant frequency shifts caused by the additional mass of trapped NPs. Inductively coupled plasma cryog
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2cc0c1e6cabf0f83129a71465be4e4ed
https://doi.org/10.1049/mnl.2013.0208
https://doi.org/10.1049/mnl.2013.0208
Autor:
Erwin Peiner, Andreas Waag, Tunga Salthammer, Stephan Merzsch, Hutomo Suryo Wasisto, Erik Uhde
Publikováno v:
Sensors and Actuators B: Chemical. 187:118-127
A portable cantilever-based airborne nanoparticle detector (CANTOR) was designed and manufactured for detecting engineered nanoparticles (ENPs) in workplace air by monitoring the resonant frequency shift induced by the mass of the particles trapped o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::87da0162e911710bd69da58ebd4aeda8
https://doi.org/10.1016/j.snb.2012.09.074
https://doi.org/10.1016/j.snb.2012.09.074