Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Stephan Mecholdt"'
Autor:
Alexander Reum, Daniel F. Feezell, Stephan Mecholdt, Mahmoud Behzadirad, John N. Randall, Tito Busani, Ashwin K. Rishinaramangalam, Joshua B. Ballard, Teodor Gotszalk, James H. G. Owen, Ivo W. Rangelow
Publikováno v:
Nano letters. 21(13)
A fundamental understanding and advancement of nanopatterning and nanometrology are essential in the future development of nanotechnology, atomic scale manipulation, and quantum technology industries. Scanning probe-based patterning/imaging technique
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e530c15a91feabc97b2e04064928fcba
https://pubmed.ncbi.nlm.nih.gov/34192467
https://pubmed.ncbi.nlm.nih.gov/34192467
Autor:
Martin Hofmann, Hans-Jörg Fecht, Ivo W. Rangelow, Mathias Holz, Markus Mohr, Stephan Mecholdt, Stefano Dallorto, Eberhard Manske
Publikováno v:
Journal of Vacuum Science & Technology B. 37:061803
Nanoelectronics manufacturing requires an ongoing development of lithography and also encompasses some “unconventional” methods. In this context, the authors use field emission scanning probe lithography (FE-SPL) to generate nanoscaled electronic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a29c2e39c791e10a56d9cde028d963ac
https://doi.org/10.1116/1.5122272
https://doi.org/10.1116/1.5122272