Zobrazeno 1 - 10
of 26
pro vyhledávání: '"Stephan Kleindiek"'
Publikováno v:
2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).
Locating ‘soft’ faults resulting from minor variations in resistance can be difficult using EBAC or RCI. Here, the authors explore the use of Electron Beam Induced Voltage for addressing these issues.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::819910dbf14d892cfb8641a2b268a2f1
https://doi.org/10.1109/ipfa49335.2020.9260790
https://doi.org/10.1109/ipfa49335.2020.9260790
Autor:
Stephan Kleindiek, Rosalinda Ring, Klaus Schock, Andreas Rummel, Michael Zschornack, Pascal Limbecker, Andreas Meyer, Randy Newkirk, Kevin Davidson, Matthias Kemmler
Publikováno v:
EDFA Technical Articles. 20:24-33
Advances in IC technology have made failure site localization extremely challenging. Through a series of case studies, the authors of this article show how such challenges can be overcome using EBIC/EBAC, current imaging, and nanoprobing. The cases i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f439f6157646c6bfd44c2c934fa9ebf0
https://doi.org/10.31399/asm.edfa.2018-3.p024
https://doi.org/10.31399/asm.edfa.2018-3.p024
Autor:
Andrew J. Smith, Julia Mahamid, Miroslava Schaffer, Andreas Rummel, Sahradha Albert, Benjamin D. Engel, Tim Laugks, Stefan Pfeffer, Stephan Kleindiek, Juergen M. Plitzko, Wolfgang Baumeister
Cryo-focused ion beam milling of frozen hydrated cells for the production of thin lamellas in combination with cryo-electron tomography (cryo-ET) has yielded unprecedented insights into the cell interior. This method allows access to native structure
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b7d040ee13cb2ca11839608b974f4159
https://doi.org/10.21203/rs.2.10392/v1
https://doi.org/10.21203/rs.2.10392/v1
Autor:
Julia Mahamid, Andrew J. Smith, Miroslava Schaffer, Stefan Pfeffer, Sahradha Albert, Juergen M. Plitzko, Andreas Rummel, Wolfgang Baumeister, Benjamin D. Engel, Tim Laugks, Stephan Kleindiek
Publikováno v:
Nature Methods
Cryo-focused ion beam milling of frozen-hydrated cells has recently provided unprecedented insights into the inner space of cells. In combination with cryo-electron tomography, this method allows access to native structures deep inside cells, enablin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f97dc7ffbd237a68b9954095dd56dd91
Autor:
Pascal Limbecker, Andreas Rummel, Klaus Schock, Matthias Kemmler, Michael Zschornack, Stephan Kleindiek, Andreas Meyer
Publikováno v:
Microelectronics Reliability. 64:313-316
Using a compact nanoprobing setup comprising eight probe tips attached to piezo-driven micromanipulators, various techniques for fault isolation are performed on 28 nm samples inside an SEM. The employed techniques include nanoprobing as well as EBAC
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2210ebc33b6bb04dc9b427fe779795e
https://doi.org/10.1016/j.microrel.2016.07.024
https://doi.org/10.1016/j.microrel.2016.07.024
Publikováno v:
Microscopy and Microanalysis. 25:874-875
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b8e3968c736a6d5e094a9af7c339be81
https://doi.org/10.1017/s1431927619005105
https://doi.org/10.1017/s1431927619005105
Both approaches have strengths and weaknesses. The SEM's strength is to quickly generate images with a large range of magnifications, making it easy to locate the area of interest. However, it doesn't yield 3D information, e.g. "invisible" contaminat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::404c080d3131e3c25bf72ac5b4a6ed47
http://doc.rero.ch/record/303095/files/S1431927614012069.pdf
http://doc.rero.ch/record/303095/files/S1431927614012069.pdf
Autor:
Vinod Narang, Wei Samuel, Matthias Kemmler, Andrew J. Smith, Teo Cheawei, Lim Soon Huat, Andreas Rummel, Stephan Kleindiek
Publikováno v:
2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).
Electron beam absorbed current (EBAC) has been used to isolate defects in BEOL metal stacks. With the increasing layout complexity, metal signal lines often run over 100um area and over multiple metal stacks. This makes SEM inspections during polishi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c9fd7ba5d5e90b6ba81915f5e52f7b6
https://doi.org/10.1109/ipfa.2017.8060144
https://doi.org/10.1109/ipfa.2017.8060144