Photoacoustic methane detection inside a MEMS microphone

Autor: Strahl, Thomas, Steinebrunner, Jonas, Weber, Christian, Wöllenstein, Jürgen, Schmitt, Katrin

Publikováno v: In Photoacoustics February 2023 29

Photoacoustic methane detection inside a MEMS microphone.

Autor: Strahl T; Laboratory for Gas Sensors, Department of Microsystems Engineering, University of Freiburg, Georges-Köhler-Allee 102, Freiburg, 79110, Germany.; Department of Gas and Process Technology, Fraunhofer Institute for Physical Measurement Techniques IPM, Georges-Köhler-Allee 301, Freiburg, 79110, Germany., Steinebrunner J; Department of Gas and Process Technology, Fraunhofer Institute for Physical Measurement Techniques IPM, Georges-Köhler-Allee 301, Freiburg, 79110, Germany., Weber C; Laboratory for Gas Sensors, Department of Microsystems Engineering, University of Freiburg, Georges-Köhler-Allee 102, Freiburg, 79110, Germany.; Department of Gas and Process Technology, Fraunhofer Institute for Physical Measurement Techniques IPM, Georges-Köhler-Allee 301, Freiburg, 79110, Germany., Wöllenstein J; Laboratory for Gas Sensors, Department of Microsystems Engineering, University of Freiburg, Georges-Köhler-Allee 102, Freiburg, 79110, Germany.; Department of Gas and Process Technology, Fraunhofer Institute for Physical Measurement Techniques IPM, Georges-Köhler-Allee 301, Freiburg, 79110, Germany., Schmitt K; Laboratory for Gas Sensors, Department of Microsystems Engineering, University of Freiburg, Georges-Köhler-Allee 102, Freiburg, 79110, Germany.; Department of Gas and Process Technology, Fraunhofer Institute for Physical Measurement Techniques IPM, Georges-Köhler-Allee 301, Freiburg, 79110, Germany.

Publikováno v: Photoacoustics [Photoacoustics] 2022 Dec 01; Vol. 29, pp. 100428. Date of Electronic Publication: 2022 Dec 01 (Print Publication: 2023).