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Autor:
Daniel Schondelmaier, Felix R. P. Limberg, Alexander Strobel, Dirk Hildebrand, Steffi Proschwitz, Hartmut Krüger, David Tröger
This paper presents a low-cost and high-throughput process for nanoscale imprinting of a novel thermally cross-linkable polymer via laser interference lithography. This technique was applied to produce the highly periodic nanometer structures such as
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::575bc257ecc7714b2082e0e6043931e4
https://publica.fraunhofer.de/handle/publica/246272
https://publica.fraunhofer.de/handle/publica/246272
