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pro vyhledávání: '"Steffen Loebeth"'
Autor:
Anna Tchikoulaeva, Yulin Zhang, Christian Holfeld, Steffen Loebeth, Heiko Wagner, Takenori Katoh, Koichi Moriizumi, Stephan Melzig, Shinichi Tanabe
Publikováno v:
SPIE Proceedings.
Traditionally, product development for reticle defect inspection mostly addressed operational requirements of the mask shops with highly individualized manufacturing. As a result, limited automation capability was available as compared to the standar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::60801e34a993408a9830fe276b71ca1c
https://doi.org/10.1117/12.2014480
https://doi.org/10.1117/12.2014480
