Zobrazeno 1 - 10
of 25
pro vyhledávání: '"Steffen Chemnitz"'
Publikováno v:
APL Materials, Vol 3, Iss 11, Pp 116102-116102-6 (2015)
Scandium alloyed aluminum nitride (Al1−xScxN) thin films were fabricated by reactive pulsed direct current co-sputtering of separate scandium and aluminum targets with x ≤ 0.37. A significant improvement of the clamped transversal piezoelectric r
Externí odkaz:
https://doaj.org/article/c2791859812b4356ab554f6a6e2d3f81
Autor:
Franz Faupel, Sindu Shree, Tim Reimer, Oleksandr Polonskyi, Vasile Postica, Mathias Hoppe, Oleg Lupan, Nicolai Ababii, V. Sontea, Steffen Chemnitz, Rainer Adelung
Publikováno v:
Materials Science in Semiconductor Processing. 87:44-53
The massive application requests for high-performance sensors indicate on the importance of precise controlling of the semiconducting oxide characteristics. The sensor longevity needed for the remote areas in harsh environments is mandatory and can b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4d56a8d0696b4fda63b5a101233ef874
https://doi.org/10.1016/j.mssp.2018.06.031
https://doi.org/10.1016/j.mssp.2018.06.031
Publikováno v:
MRS Advances. 1:209-213
The performance of a novel type of NdFeB micromagnets fabricated by agglomeration of magnetic powder by atomic layer deposition is investigated. The ALD-bonded micromagnets can withstand standard BEOL (back-end of line) processing and heat treatments
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::11358fd7fcab910ffa0089390ad3aeec
https://doi.org/10.1557/adv.2015.19
https://doi.org/10.1557/adv.2015.19
Publikováno v:
Microsystem Technologies. 23:745-754
This paper reports on the capability of a nickel---tin (Ni---Sn) bond solder to be stable at high temperature application up to 600 $$^{\circ }$$źC. The Ni---Sn bond solder is fabricated using a transient liquid phase method of a 6$$^{\prime \prime
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac1e08039c72ea9af1c10e2c4743505b
https://doi.org/10.1007/s00542-015-2738-6
https://doi.org/10.1007/s00542-015-2738-6
Autor:
Bernhard Wagner, Björn Jensen, Steffen Chemnitz, Lorenz Kienle, Nando Budhiman, Ulrich Schürmann
Publikováno v:
physica status solidi (a). 213:1055-1062
authoren Transmission electron microscopy (TEM) analysis, including energy dispersive X-ray (EDX) (elemental mapping, line, and point measurements) and energy filtered TEM (EFTEM) methods, is applied to investigate the high temperature reliability, e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4f4a0babfb11c6dc1c56cc549af88f11
https://doi.org/10.1002/pssa.201532654
https://doi.org/10.1002/pssa.201532654
Autor:
Stefan Mátéfi-Tempfli, Tim Reimer, Steffen Chemnitz, Jost Adam, Roana Melina de Oliveira Hansen, Bernhard Wagner, Mária Mátéfi-Tempfli, Romans Safonovs, Wolfgang Benecke
Publikováno v:
Oliveira Hansen, R M D, Mátéfi-Tempfli, M, Safonovs, R, Adam, J, Chemnitz, S, Reimer, T, Wagner, B, Benecke, W & Mátéfi-Tempfli, S 2018, ' Magnetic films for electromagnetic actuation in MEMS switches ', Microsystem Technologies: Micro-and Nanosystems Information Storage and Processing Systems, vol. 24, no. 4, pp. 1987-1994 . https://doi.org/10.1007/s00542-017-3595-2
This paper investigates the fabrication of magnetic films via electroplating to be applied into electromagnetic actuated micro electro-mechanical systems (MEMS) switches. Cobalt and nickel films (1 µm thicknesses) were deposited on gold coated silic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c498206508ab2abc347e4f66683b4fce
https://publica.fraunhofer.de/handle/publica/251364
https://publica.fraunhofer.de/handle/publica/251364
Autor:
A. Kulkarni, Steffen Chemnitz, Bernhard Wagner, Fabian Lofink, G. Piechotta, Tim Reimer, Thomas Lisec
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
A novel disruptive fabrication technique for MEMS is presented, based on the agglomeration of powders into three-dimensional porous structures by atomic layer deposition (ALD). Since ALD is performed at low temperatures, such structures can be create
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78f95f7730d6ab57f9c9024936c139c5
https://doi.org/10.1109/transducers.2017.7994078
https://doi.org/10.1109/transducers.2017.7994078
This paper describes a novel fabrication technique for microelectromechanical systems (MEMS) based on the agglomeration of micron-sized powder into rigid 3-D porous structures by means of atomic layer deposition (ALD). Since ALD is performed at low t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::42096128e0a148b6c1f368fd575170e9
https://publica.fraunhofer.de/handle/publica/252063
https://publica.fraunhofer.de/handle/publica/252063
Autor:
Carsten Ronning, Steffen Chemnitz, Wolfgang Benecke, Yogendra Kumar Mishra, Rainer Adelung, Sören Kaps, Robert Röder, Tim Reimer, Ingo Paulowicz, Oleg Lupan
Publikováno v:
ACS Applied Materials & Interfaces. 6:7806-7815
Direct growth of quasi-one-dimensional nano- and microstructures in desired places of complex shaped substrates using simple growth methods is highly demanded aspect for various applications. In this work, we have demonstrated direct integration of Z
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d0877b8a849ab6d5b6bb6614a49da759
https://doi.org/10.1021/am5010877
https://doi.org/10.1021/am5010877
Autor:
Mathias Hoppe, Rainer Adelung, Dawit Gedamu, Ingo Paulowicz, L. Ghimpu, Ion Tiginyanu, Steffen Chemnitz, Oleg Lupan, D. Hammerich, Tim Reimer, Yogendra Kumar Mishra, V. Cretu
Publikováno v:
Journal of Nanoelectronics and Optoelectronics. 9:257-264
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f44136024ee72804887337fe4907981d
https://doi.org/10.1166/jno.2014.1579
https://doi.org/10.1166/jno.2014.1579