Zobrazeno 1 - 10
of 26
pro vyhledávání: '"Stefanie Sergeant"'
Autor:
Steven Brems, Souvik Ghosh, Quentin Smets, Marie-Emmanuelle Boulon, Andries Boelen, Koen Kennes, Hung-Chieh Tsai, Francois Chancerel, Clement Merckling, Pieter-Jan Wyndaele, Jean-Francois De Marneffe, Tom Schram, Pawan Kumar, Stefanie Sergeant, Thomas Nuytten, Stefan De Gendt, Henry Medina Silva, Benjamin Groven, Pierre Morin, Gouri Sankar Kar, César Lockhart De la Rosa, Didit Yudistira, Joris Van Campenhout, Inge Asselberghs, Alain Phommahaxay
Publikováno v:
2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5bbbbfb500f3632e1fef09b85aeb6972
https://doi.org/10.1109/vlsi-tsa/vlsi-dat57221.2023.10134381
https://doi.org/10.1109/vlsi-tsa/vlsi-dat57221.2023.10134381
Autor:
Pieter-Jan Wyndaele, Jean-Francois de Marneffe, Stefanie Sergeant, César Lockhart de la Rosa, Steven Brems, Arantxa Caro, Stefan De Gendt
Two-dimensional transition metal dichalcogenides (2D TMDC’s) hold a wide variety of applications, among which microelectronic devices. However, various challenges hinder their integration e.g., good dielectric deposition on the 2D TMDC surface. In
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4afc7b5bcda381a93d16ad107fdcf040
https://doi.org/10.21203/rs.3.rs-2550514/v1
https://doi.org/10.21203/rs.3.rs-2550514/v1
Autor:
Jonas Keukelier, Ludovic Goux, Thomas Nuytten, Sergiu Clima, Stefanie Sergeant, Karl Opsomer, Wouter Devulder, Gouri Sankar Kar, Christophe Detavernier
Publikováno v:
JOURNAL OF MATERIALS CHEMISTRY C
Raman spectroscopy measurements are performed on sputtered GexSe1-x thin films to identify bond presence. A large amount of homopolar bonds are found, including Ge-Ge bonds that can be attributed to Ge clustering. A time-resolved approach to Raman sp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a6f958578c6d8dfd13ec649fb0cb7663
https://doi.org/10.1039/d0tc04086j
https://doi.org/10.1039/d0tc04086j
Autor:
Mattia Pasquali, Patrick Carolan, Stefanie Sergeant, Johan Meersschaut, Valentina Spampinato, Thierry Conard, Alessandro Viva, Stefan De Gendt, Silvia Armini
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d1b995b950842857bae129784722356d
https://hdl.handle.net/20.500.11769/559944
https://hdl.handle.net/20.500.11769/559944
Autor:
Valentina Spampinato, Alexis Franquet, Steven Brems, Marina Y. Timmermans, Maxim Korytov, Emily Gallagher, Yide Zhang, Wilfried Alaerts, Thierry Conard, Ehsan Jazaeri, Thomas Nuytten, Masoud Dialameh, Cedric Huyghebaert, Stefanie Sergeant, Ivan Pollentier, Johan Meersschaut
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 20
Background: An extreme ultraviolet (EUV)-transparent pellicle must be used during lithography to protect the photomask from fall-on particles. A pellicle made of free-standing carbon nanotube (CNT) films stops particles despite the presence of gaps w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fc963199ee0b38410f16d1b73586daa3
https://doi.org/10.1117/1.jmm.20.3.031010
https://doi.org/10.1117/1.jmm.20.3.031010
Autor:
Philippe Leray, Valentina Spampinato, R. Koret, Alain Moussa, Ilse Hoflijk, J. Hung, Y. Muraki, Thomas Nuytten, Janusz Bogdanowicz, Johan Meersschaut, Alexis Franquet, Stefanie Sergeant, Yusuke Oniki, N. Claessens, Thierry Conard, Karine Kenis, Anne-Laure Charley, D. Van den Heuvel
Publikováno v:
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
Nanosheet Field-Effect Transistors (FETs) are candidates to replace today’s finFETs as they offer both an enhanced electrostatic control and a reduced footprint. The processing of these devices involves the selective lateral etching, also called ca
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ac9351cae9d7e2b039311645714042ac
https://doi.org/10.1117/12.2581800
https://doi.org/10.1117/12.2581800
Autor:
Masoud Dialameh, Ivan Pollentier, Yide Zhang, Ehsan Jazaeri, Steven Brems, Alexis Franquet, Maxim Korytov, Wilfried Alaerts, Emily Gallagher, Thierry Conard, Cedric Huyghebaert, Marina Y. Timmermans, Thomas Nuytten, Stefanie Sergeant, Valentina Spampinato, Johan Meersschaut
Research on carbon nanotube (CNT) films for the EUV pellicle application was initiated at imec in 2015 triggered by the remarkable optical, mechanical, and thermal properties of the CNT material. Today the advancement of the CNT material synthesis to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::df8af008fd775b1d775c0a6022abb5bc
https://hdl.handle.net/20.500.11769/559931
https://hdl.handle.net/20.500.11769/559931
Autor:
Cesar Javier Lockhart de la Rosa, Thomas Nuytten, Luca Banszerus, Stefanie Sergeant, Vivek K. Mootheri, Takashi Taniguchi, Kenji Watanbe, Christoph Stampfer, Cedric Huyghebaert, Stefan De Gendt, Alessandra Leonhardt
Defect characterization of 2D materials is a critical aspect for their successful integration in future electronic devices. Here, a simple characterization technique is proposed that opens a path for fast, non-invasive, quality assessment of transiti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______2659::7b68e9e71ad5d03bcafd869e639d1f4c
https://zenodo.org/record/4686975
https://zenodo.org/record/4686975