Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Stefan Schlichtherle"'
Publikováno v:
Vakuum in Forschung und Praxis. 23:27-35
Fur die Herstellung von PVD–Schichten im Dickenbereich von Nanometern bis Mikrometern sind grundsatzlich nur einige wenige Beschichtungstechnologien und deren spezielle, auf Applikation zugeschnittene, Varianten im Einsatz. Basis-PVD-Verfahren wie
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ccc94c9b7b0271d99249acd04c0dc79c
https://doi.org/10.1002/vipr.201100467
https://doi.org/10.1002/vipr.201100467
Publikováno v:
Thin Solid Films. 516:4587-4592
Thin films of Ta 2 O 5 , Nb 2 O 5 , and HfO 2 were deposited by reactive-low-voltage-ion-plating (RLVIP) on unheated glass and silicon substrates. The film thickness was about 200 nm. Optical properties as well as mechanical film stress of these laye
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1cb92a0e3f559e63ecafc7983a09ff08
https://doi.org/10.1016/j.tsf.2007.06.017
https://doi.org/10.1016/j.tsf.2007.06.017
Publikováno v:
Vakuum in Forschung und Praxis. 19:6-12
The plasma of different dc and dc pulsed pvd processes (TiN and Ta2O5 magnetron sputtering, Ta2O5 ion plating) has been investigated by means of a mass spectrometric plasma monitoring system PPM421 (Inficon). The ion energy distribution of the proces
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f0982c54eebd3fbe2849a0929c3aa64b
https://doi.org/10.1002/vipr.200700325
https://doi.org/10.1002/vipr.200700325
Publikováno v:
ECS Transactions. 7:2407-2416
In the last decade of SOFC metallic interconnect component development barrier coatings have proven being indispensable as functional layers and therefore gained serious attention. Diffusion processes at the interface between metallic and other cell
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::79151837babeb53f9175ccf01fd18931
https://doi.org/10.1149/1.2729363
https://doi.org/10.1149/1.2729363
Publikováno v:
Vakuum in Forschung und Praxis. 15:83-85
Moderne optische Vielschichtsysteme fordern hohe Schichtstabilitat, geringe mechanische Schichtspannungen und kleinste optische Verluste der sich aufbauenden Einzelschichten. Die gangige industriell genutzte Methode zur Verminderung von mechanischen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6c3b7806252b68e2ea287f3825e807a6
https://doi.org/10.1002/vipr.200390024
https://doi.org/10.1002/vipr.200390024
Autor:
Hans K. Pulker, Stefan Schlichtherle
Publikováno v:
SPIE Proceedings.
The density of the material in a deposited film determines many important film properties, for example hardness and abrasions resistance, adherence to the substrate, refractive index, film stress, flatness and film permeation. Chemical compound films
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::75d67915eb9505781b92decfbc9e9c7b
https://doi.org/10.1117/12.513891
https://doi.org/10.1117/12.513891
Autor:
Hans K. Pulker, Stefan Schlichtherle
Publikováno v:
Optical Interference Coatings.
Structure and density of the material in a deposited film determine many important film characteristics. Energetic coating conditions, strongly influence both and the resulting environmental stable, constrained amorphous films offer interesting optic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::182fd0495f62e9d3825df75d8ab8a62b
https://doi.org/10.1364/oic.2004.tha1
https://doi.org/10.1364/oic.2004.tha1