Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Stefan Müller-Pfeiffer"'
Publikováno v:
SPIE Proceedings.
Shack-Hartmann wave front sensors (SHS) are an accurate and highly versatile tool for characterizing and adjusting high performance optical systems, especially in the DUV wavelength range. The conventional set-up uses a single path approach. An illum
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa17a59d631591a1045a2882d63e4844
https://doi.org/10.1117/12.797726
https://doi.org/10.1117/12.797726
Autor:
Oliver Falkenstörfer, Stefan Müller-Pfeiffer, Wolfgang Seiferth, Hans Lauth, Thomas Weyh, Matthias Esselbach
Publikováno v:
Optifab 2007: Technical Digest.
The fast development of sensors with high sensitivity and growing pixel numbers for the IR range drives the development of suitable optical systems. This is enforced by the growing demands of the defense and security sector. JENOPTIK LASER, OPTIK, SY
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d8ec3e148bbe3017fd3e181429aa2b98
https://doi.org/10.1117/12.720214
https://doi.org/10.1117/12.720214
Publikováno v:
SPIE Proceedings.
Aside from steppers also inspection systems in the semiconductor industry as well as in micro material processing require DUV imaging optics with very high optical requirements. A test and adjustments set-up based on the Shack-Hartmann wave front sen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fb94dd8cf395452347d723343609adc3
https://doi.org/10.1117/12.712506
https://doi.org/10.1117/12.712506