Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Stefan Kulper"'
Publikováno v:
1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017, 2017-January, 726-731
CCTA
CCTA
Correct functionality of semiconductor devices depends on the overlay performance between device layers. Future smaller device features consequently require more accurate overlay metrology tools. In this paper we present a large dynamic range AFM ove
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7ccfd54959defd53396ad0c1c6ececa6
https://doi.org/10.1109/CCTA.2017.8062548
https://doi.org/10.1109/CCTA.2017.8062548
