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Autor:
Stefan Landis
Lithography is an extremely complex tool – based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include
Autor:
Stefan Landis
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc
Autor:
Frederic Milesi, Stéfan Landis, Denis Mariolle, Frédéric Gaillard, Lamia Nouri, Nicolas Posseme, Christophe Licitra
Publikováno v:
ECS Meeting Abstracts. :1239-1239
Fabrication processes that microelectronic developed for Integrated circuit (IC) technologies for decades, do not meet the new emerging structuration requirements, in particular for non-IC related technologies ones, such as MEMS/NEMS, Micro-Fluidics,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::879f5928860042783d34d61f7175f5c5
https://doi.org/10.1149/ma2017-01/25/1239
https://doi.org/10.1149/ma2017-01/25/1239
