Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Srinivasa Reddy Kuppireddi"'
Publikováno v:
International Journal of Materials Science and Engineering. 1:79-81
Epoxy based photopolymer–SU8 is evaluated as microwave packaging material for packaging of Radio Frequency Micro Electro Mechanical Systems (RFMEMS). Standard and Slotted Coplanar Wave guide (CPW) transmission lines are chosen as test vehicles. Tra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::edc2fb581989b028d1710cf1939965a2
https://doi.org/10.12720/ijmse.1.2.79-81
https://doi.org/10.12720/ijmse.1.2.79-81
Publikováno v:
NORCHIP
This work describes a simple process method for obtaining sub-micron and high aspect ratio lateral electrode gaps for rectangular plate micro-resonators and the resulting advantages. The structures are built of [110] single crystal silicon substrate
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5faed8456e209525091249bdd57f4c17
https://doi.org/10.1109/norchip.2013.6701998
https://doi.org/10.1109/norchip.2013.6701998
Publikováno v:
CAS 2013 (International Semiconductor Conference).
This work describes a simple process method for obtaining sub-micron lateral electrode gaps for vibrating square plate resonators and the resulting advantages. A novel combined two step oxidation processes and post-process electrostatic actuation met
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::32a8f83c3fcd85746bf5d437c0407056
https://doi.org/10.1109/smicnd.2013.6688687
https://doi.org/10.1109/smicnd.2013.6688687
Autor:
V. Janardhana, Srinivasa Reddy Kuppireddi, Sayanu Pamidighantam, Jibendu Sekhar Roy, R.G. Kulkarn, Oddvar Søråsen
Publikováno v:
NORCHIP
Epoxy based photo polymer — SU8 is evaluated as microwave packaging material for packaging of Radio Frequency Micro Electro Mechanical Systems (RFMEMS). Standard and Slotted Coplanar Waveguide transmission lines are chosen as test vehicles. Transmi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d8372c68c6b878ef5dffb17fdf3bc745
https://doi.org/10.1109/norchp.2012.6403146
https://doi.org/10.1109/norchp.2012.6403146