Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Srikanth Kommu"'
Autor:
Zhiqiang Fan, Zhimin Zhu, Tim Limmer, Srikanth Kommu, Xianggui (Shawn) Ye, Joyce Lowes, Richard Daugherty, James Lamb
Publikováno v:
Advances in Patterning Materials and Processes XXXVII.
Silicon hardmask (Si-HM) materials used in lithography processes play a critical role in transferring patterns to desired substrates. In addition, these materials allow for the tuning of optical properties such as reflectivity and optical distributio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::87e198f8f726c53499e51d3b0992d461
https://doi.org/10.1117/12.2552929
https://doi.org/10.1117/12.2552929
Publikováno v:
ECS Transactions. 16:261-266
This work is focussed on the modeling and simulation of structural deformation of silicon wafers during their initial heat-up in a CVD reactor chamber, prior to the chemical vapor deposition process. The wafer structural deformation can lead to some
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::59be003592d98c1f3dd717c71b60aff5
https://doi.org/10.1149/1.2980309
https://doi.org/10.1149/1.2980309
Publikováno v:
Chemical Engineering Science. 59:345-358
To accurately predict aerosol dynamics in various systems, it is imperative to combine the governing equations for transport of momentum, mass and energy as well as reaction kinetics with an accurate procedure for solving the general dynamic equation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a94baaf0a8132daae47ec7e16746a254
https://doi.org/10.1016/j.ces.2003.05.009
https://doi.org/10.1016/j.ces.2003.05.009
Publikováno v:
Chemical Engineering Science. 59:359-371
A highly computationally efficient and accurate semi-implicit numerical technique based on the concept of operator splitting (described in detail in Part I of this paper) has been used to solve the General Dynamic Equation in complex, non-isothermal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::acf7c8554f43f17c5f8af5ac61e6e1a1
https://doi.org/10.1016/j.ces.2003.05.010
https://doi.org/10.1016/j.ces.2003.05.010
Autor:
Bamin Khomami, Srikanth Kommu
Publikováno v:
Industrial & Engineering Chemistry Research. 41:732-743
A detailed three-dimensional simulation model has been used to explore new designs and operating conditions that will lead to high-volume production of single-crystal silicon wafers in horizontal single-wafer reactors. As the SiHCl3−H2 system is a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1abb2073f12a42c89b51d6cfbc64a34b
https://doi.org/10.1021/ie010412w
https://doi.org/10.1021/ie010412w
Publikováno v:
Polymer Composites. 19:335-346
Injected pultrusion (IP) is an attractive process for high volume, high performance, and low cost manufacture of continuous fiber reinforced polymer matrix composites. In this work we focus our attention on development of a computer simulation model
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::828c4199ddd69e0b44ad53e245ff60f0
https://doi.org/10.1002/pc.10106
https://doi.org/10.1002/pc.10106
Publikováno v:
ECS Meeting Abstracts. :2003-2003
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e7918edc8ddcf2ef27e841bc3e0d33e7
https://doi.org/10.1149/ma2008-02/26/2003
https://doi.org/10.1149/ma2008-02/26/2003
Autor:
John A. Pitney, Srikanth Kommu
Publikováno v:
ECS Meeting Abstracts. :1983-1983
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1510d757387eb4564c57748c98110e1a
https://doi.org/10.1149/ma2008-02/26/1983
https://doi.org/10.1149/ma2008-02/26/1983
Publikováno v:
Journal of The Electrochemical Society. 147:1538
The main goal of this study is to examine the possibility of using detailed three-dimensional simulations of transport of momentum, energy, and mass in horizontal single-wafer epitaxial silicon reactors in conjunction with relatively simple kinetic m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cd558698e1da9bf3dcc350a06275c1b3
https://doi.org/10.1149/1.1393391
https://doi.org/10.1149/1.1393391