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High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with such a high resolution that the characterization of the same is out of the capabi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8e7ec9aeb6ee2a5dc2d30703e5a3d672
https://doi.org/10.20944/preprints202010.0401.v1
https://doi.org/10.20944/preprints202010.0401.v1