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pro vyhledávání: '"Srijith Bangaru Thirumalai Raj"'
Publikováno v:
Sensors, Vol 20, Iss 24, p 7034 (2020)
High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with a resolution as low as a few nanoradians, with bandwidths as high as several kilo
Externí odkaz:
https://doaj.org/article/8d3cc4ba53a64ea2a9f5900d06d1644c