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pro vyhledávání: '"Spencer Gellerup"'
Autor:
Nigel D. Shepherd, Christopher Muratore, Maddox Dockins, Chukwudi E. Iheomamere, Corey L. Arnold, Andrey A. Voevodin, Spencer Gellerup, Nicholas R. Glavin
Publikováno v:
Vacuum. 188:110211
Ultra-thin amorphous boron oxynitride films were deposited at room temperature on silicon and polymer substrates using radio frequency magnetron sputtering of a hexagonal boron nitride target in varied argon-nitrogen background gas ratios. The effect