Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Spencer Gellerup"'
Autor:
Nigel D. Shepherd, Christopher Muratore, Maddox Dockins, Chukwudi E. Iheomamere, Corey L. Arnold, Andrey A. Voevodin, Spencer Gellerup, Nicholas R. Glavin
Publikováno v:
Vacuum. 188:110211
Ultra-thin amorphous boron oxynitride films were deposited at room temperature on silicon and polymer substrates using radio frequency magnetron sputtering of a hexagonal boron nitride target in varied argon-nitrogen background gas ratios. The effect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc30b5e454fd68a13bbea73da24fe366
https://doi.org/10.1016/j.vacuum.2021.110211
https://doi.org/10.1016/j.vacuum.2021.110211
Autor:
Gellerup, Spencer, Arnold, Corey L., Muratore, Christopher, Glavin, Nicholas R., Shepherd, Nigel D., Voevodin, Andrey A.
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Sep2023, Vol. 41 Issue 5, p1-8, 8p