Zobrazeno 1 - 10
of 17
pro vyhledávání: '"Soo Ren How"'
Publikováno v:
Applied Mechanics and Materials. :652-656
Fluorine doped tin oxide (FTO) thin films were prepared at different deposition temperatures using the spray pyrolysis deposition (SPD) technique. The deposition temperature were ranging from 250°C °C to 450°C and the precursor used was 0.5M of Sn
Autor:
Soo Ren How, Nafarizal Nayan, Ahmad Shuhaimi, Mohd Zainizan Sahdan, Jais Lias, Mohd Khairul Ahmad
Publikováno v:
AIP Conference Proceedings.
In the present study, reactive magnetron sputtering plasmas were produced using pulse-modulated radio frequency (rf) power supply connected to titanium sputter target. The pulse duty ratio were varied at 30, 50 and 70 %. Nitrogen and argon gas were i
Publikováno v:
AIP Conference Proceedings.
For ionized physical vapor deposition (known as IPVD) technique, investigation on the ionization mechanism of titanium atoms is very important during the deposition of titanium nitride (TiN) thin film using reactive magnetron sputtering plasma. The i
Publikováno v:
AIP Conference Proceedings.
For this experiment, a high-pressure magnetron sputtering plasma was used for plasma discharge with various flow rates of nitrogen gas. The introduction of nitrogen gas modifies the discharge leading to modifications of plasma parameters and ionizati
Publikováno v:
2016 IEEE International Conference on Semiconductor Electronics (ICSE).
In this study, a high-pressure magnetron sputtering plasma was used for plasma discharge with various discharge powers in the mixture of argon-nitrogen discharge. The introduction of nitrogen gas modifies the discharge leading to modifications of pla
Autor:
Jais Lias, Mohd Khairul Ahmad, Mohamad Rusop Mahmood, Nafarizal Nayan, Mohd Zainizan Sahdan, Mohamad Hafiz Mamat, Soo Ren How, Ali Aldalbahi
Publikováno v:
Journal of Physics: Conference Series. 1027:012005
Optical emission spectroscopy has been employed as non-invasive plasma diagnostics method and it is to detect the light emission during titanium nitride deposition using magnetron sputtering plasma discharge. The optical emission from argon and titan
Autor:
Chin Fhong Soon, Mohd Zainizan Sahdan, Ahmad Shuhaimi Abu Bakar, Uda Hashim, Mohd Khairul Ahmad, Soo Ren How, Nafarizal Nayan, M. K. Md Arshad, Mohd Yazid Ahmad, Jais Lias
Publikováno v:
Journal of Physics: Conference Series. 995:012068
The ion, electron density and electron temperature during formation of TiN films in reactive magnetron sputtering system have been investigated for various settings of radio frequency (RF) power and working pressure by using Langmuir probe measuremen
Publikováno v:
AIP Conference Proceedings; 2017, Vol. 1824 Issue 1, p1-5, 5p, 3 Graphs
Autor:
Nayan, Nafarizal, Soo Ren How, Lias, Jais, Ahmad, Mohd Khairul, Sahdan, Mohd Zainizan, Shuhaimi, Ahmad
Publikováno v:
AIP Conference Proceedings; 2017, Vol. 1824 Issue 1, p1-5, 5p, 4 Graphs
Publikováno v:
AIP Conference Proceedings; 2017, Vol. 1788 Issue 1, p1-5, 5p, 1 Diagram, 4 Graphs