Výsledky vyhledávání - "Songyong Pan"

Sub-pixel position estimation algorithm based on Gaussian fitting and sampling theorem interpolation for wafer alignment

Autor: Jinghao Xu, Yang Bu, Ting Shu, Lili Fan, Shaoqing Wang, Fenghua Yuan, Songyong Pan, Xiangzhao Wang, Fengzhao Dai, Xiaona Yan

Publikováno v: Applied optics. 60(31)

Wafer alignment is the core technique of lithographic tools. Image-processing-based wafer alignment techniques are commonly used in lithographic tools. An alignment algorithm is used to analyze the alignment mark image for obtaining the mark position

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::668859df67c4f7e21cd2c0440b0c5f88
https://pubmed.ncbi.nlm.nih.gov/34807141

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Measurement algorithm for wafer alignment based on principal component analysis

Autor: Jinghao Xu, Xiangzhao Wang, Fengzhao Dai, Lili Fan, Shaoqing Wang, Songyong Pan, Fenghua Yuan, Ting Shu, Yang Bu

Publikováno v: Applied Optics. 60:5569

We propose a novel measurement algorithm for wafer alignment technology based on principal component analysis (PCA) of a mark image. The waveform of the mark is extracted from the enlarged mark image, which is collected by CCD. The position of the ma

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fa8e05c10737fe4bee852ed8a0bb5216
https://doi.org/10.1364/ao.425767

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