Zobrazeno 1 - 10
of 28
pro vyhledávání: '"Song-Yun Kang"'
Autor:
Wen-Kao Huang, Wan-Yi Lian, Xiao-Yu Zhuo, Song-Yun Kang, Wen-Chi Luo, Yi-Shan Xie, Gui-Yang Xi, Ke-Xuan Liu, Wei-Feng Liu
Publikováno v:
Renal Failure, Vol 45, Iss 2 (2023)
Background Bispectral index (BIS) is a processed electroencephalography monitoring tool and is widely used in anesthetic depth monitoring. Deep anesthesia exposure may be associated with multiple adverse outcomes. However, the relationship between an
Externí odkaz:
https://doaj.org/article/dc9a4ce050024036b8cfa1b986a63e99
Publikováno v:
Journal of Vacuum Science & Technology A. 41
Optical emission spectroscopy was used as a real-time monitor of the atomic layer etching (ALE) of Si in an Ar inductively coupled plasma (ICP). Pulses of Cl2 gas were repetitively injected into a continuous flow of Ar, followed by the ignition of th
Autor:
Song-Yun Kang, Kazuya Okubo
Publikováno v:
Advanced Etch Technology and Process Integration for Nanopatterning X.
This paper describes how to overcome the challenges for EUV Lithography such as compatibility of performance, cost and defect reduction. The starting point application of innovative process technologies (e.g., high selectivity etching, atomic layer l
Autor:
Takuro Nishimura, Ryo Tamura, Takaho Tanigawa, H. Inoue, Sadahiko Miura, Hiroaki Honjo, T. Watanabe, Yasushi Yagi, M. Yasuhira, Koichi Takatsuki, Hiroki Koike, Takuya Kubo, Takashi Saito, Koji Yamashita, Y. Noguchi, Tetsuo Endoh, Koh Murata, Hideo Ohno, Song Yun Kang, Shoji Ikeda, Hideo Sato
Publikováno v:
2018 IEEE International Memory Workshop (IMW).
We have successfully developed advanced low-damage and short-failure-free RIE technology under 300 mm process down to 32 nmφ MTJ patterning. By using the developed RIE technology, we have achieved significant improvement in TMR ratio, coercivity, th
Autor:
Daisuke Ogawa, Mitsuhiro Omura, Taku Iwase, Haruka Suzuki, Shota Nunomura, Yasushi Sonoda, Kazuo Takahashi, Nobuyuki Kuboi, Takayoshi Tsutsumi, Kenji Ishikawa, Yoshito Kamaji, Tomohiro Nozaki, Kenichi Yoshikawa, Tetsuji Shimizu, Kazunori Shinoda, Nobuyuki Negishi, Tatsuo Ishijima, Song-Yun Kang, Moritaka Nakamura, Kazunori Koga
Publikováno v:
Japanese Journal of Applied Physics. 58:SE0802
Autor:
Moritaka Nakamura, Kazunori Koga, Kazunori Shinoda, Shota Nunomura, Yoshito Kamaji, Yasushi Sonoda, Kazuo Takahashi, Kenichi Yoshikawa, Tomohiro Nozaki, Song-Yun Kang, Kenji Ishikawa, Daisuke Ogawa, Takayoshi Tsutsumi, Nobuyuki Kuboi, Tatsuo Ishijima, Tetsuji Shimizu, Taku Iwase, Haruka Suzuki, Mitsuhiro Omura, Nobuyuki Negishi
Publikováno v:
Japanese Journal of Applied Physics. 58:SE0803
Autor:
Daisuke Ogawa, Tomohiro Nozaki, Tatsuo Ishijima, Moritaka Nakamura, Kazunori Koga, Kazunori Shinoda, Song-Yun Kang, Taku Iwase, Haruka Suzuki, Kazuo Takahashi, Nobuyuki Negishi, Takayoshi Tsutsumi, Nobuyuki Kuboi, Shota Nunomura, Kenichi Yoshikawa, Kenji Ishikawa, Mitsuhiro Omura, Yoshito Kamaji, Tetsuji Shimizu, Yasushi Sonoda
Publikováno v:
Japanese Journal of Applied Physics. 58:SE0804
Autor:
Jozef Brcka, Song-Yun Kang
Publikováno v:
Plasma Processes and Polymers. 6:S776-S783
The plasma produced by a radial line slot antenna (RLSA) source is discussed based on a simulation using a multiphysics coupled 2D fluid model. The technological aspects in a silicon nitride chemical vapor deposition (CVD) process using a disilane an
Publikováno v:
Japanese Journal of Applied Physics. 47:6843-6848
An octafluorocyclopentene (c-C5F8)/Ar/O2 plasma chemistry mechanism has been developed using a combination of quantum chemistry methods, a zero-dimensional plasma kinetics model, and results from quadrupole mass spectrometer (QMS) and actinometry exp
Publikováno v:
Chemistry - A European Journal. 8:5351-5362
In this paper, we present a detailed mechanism for the complete decomposition of NH3 to NHx(a) (x = 0-2). Our calculations show that the initial decomposition of NH3 to NH2(a) and H(a) is facile, with a transition-state energy 7.4 kcal mol-1 below th