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pro vyhledávání: '"Somsak Teerawattansook"'
Autor:
Somsak Teerawattansook, Kazutoshi Takenoshita, Martin Richardson, Chiew-Seng Koay, Vivek Bakshi
Publikováno v:
SPIE Proceedings.
The EUVL collector mirror reflectivity degradation can be measured as erosion of the mirror surface caused by the high energy ion emissions. Characterizing the ion emission permits the analysis of the mechanisms of erosion and provides the capability
Autor:
Martin Richardson, Chiew-Seng Koay, Kazutoshi Takenoshita, Howard A. Scott, Moza M. Al-Rabban, Somsak Teerawattansook, C. Keyser, Simi George
Publikováno v:
SPIE Proceedings.
The most pressing technical issue for the success of EUV lithography is the provision of a high repetition-rate source having sufficient brightness, lifetime, and with sufficiently low off-band heating and particulate emissions characteristics to be
Autor:
Kazutoshi Takenoshita, Simi George, Somsak Teerawattansook, Chiew-Seng Koay, Vivek Bakshi, Martin Richardson
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 23:2879
Mirror erosion by high energy ion emission from extreme UV light sources is one of the main factors contributing to EUVL collector mirror reflectivity degradation. We are measuring ion energy distributions at the mirror distance from the plasma utili