Zobrazeno 1 - 10
of 154
pro vyhledávání: '"Soltwisch, Victor"'
Autor:
Andrle, Anna, Hönicke, Philipp, Schneider, Philipp, Kayser, Yves, Hammerschmidt, Martin, Burger, Sven, Scholze, Frank, Beckhoff, Burkhard, Soltwisch, Victor
Publikováno v:
Proc. SPIE 11057, 110570M (2019)
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Using the grazing incidence X-ray fluoresence technique, which is taking
Externí odkaz:
http://arxiv.org/abs/2104.13749
Autor:
Saadeh, Qais, Naujok, Philipp, Philipsen, Vicky, Hönicke, Philipp, Laubis, Christian, Buchholz, Christian, Andrle, Anna, Stadelhoff, Christian, Mentzel, Heiko, Schönstedt, Anja, Soltwisch, Victor, Scholze, Frank
The optical constants of ruthenium in the spectral range 8 nm to 23.75 nm with their corresponding uncertainties are derived from the reflectance of a sputtered ruthenium thin film in the Extreme Ultraviolet (EUV) spectral range measured using monoch
Externí odkaz:
http://arxiv.org/abs/2103.11868
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the characterization of n
Externí odkaz:
http://arxiv.org/abs/2103.03334
Autor:
Andrle, Anna, Hönicke, Philipp, Gwalt, Grzegorz, Schneider, Philipp-Immanuel, Kayser, Yves, Siewert, Frank, Soltwisch, Victor
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic circuits. Modern transistor architectures for e.g. FinFETs are realize
Externí odkaz:
http://arxiv.org/abs/2102.06600
Autor:
Andrle, Anna, Farchmin, Nando, Hagemann, Paul, Heidenreich, Sebastian, Soltwisch, Victor, Steidl, Gabriele
Grazing incidence X-ray fluorescence is a non-destructive technique for analyzing the geometry and compositional parameters of nanostructures appearing e.g. in computer chips. In this paper, we propose to reconstruct the posterior parameter distribut
Externí odkaz:
http://arxiv.org/abs/2102.03189
Autor:
Hönicke, Philipp, Andrle, Anna, Kayser, Yves, Nikolaev, Konstantin V., Probst, Jürgen, Scholze, Frank, Soltwisch, Victor, Weimann, Thomas, Beckhoff, Burkhard
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional recons
Externí odkaz:
http://arxiv.org/abs/2005.02078
Autor:
Pflüger, Mika, Kline, R. Joseph, Herrero, Analía Fernández, Hammerschmidt, Martin, Soltwisch, Victor, Krumrey, Michael
Publikováno v:
J. of Micro/Nanolithography, MEMS, and MOEMS, 19(1), 014001 (2020)
Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-angle X-ray scattering (GISAXS) is being considered because measurement
Externí odkaz:
http://arxiv.org/abs/1910.08532
Periodic nanostructures are fundamental elements in optical instrumentation as well as basis structures in integrated electronic circuits. Decreasing sizes and increasing complexity of nanostructures have made roughness a limiting parameter to the pe
Externí odkaz:
http://arxiv.org/abs/1907.05307
Autor:
Pflüger, Mika, Soltwisch, Victor, Xavier, Jolly, Probst, Jürgen, Scholze, Frank, Becker, Christiane, Krumrey, Michael
Publikováno v:
J. Appl. Cryst. 52, 322-331. (2019)
In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm x 15 mm on photonic structures produced by nanoimprint lithography. The photonic structure
Externí odkaz:
http://arxiv.org/abs/1903.08101
Autor:
Saadeh, Qais, Naujok, Philipp, Thakare, Devesh, Wu, Meiyi, Philipsen, Vicky, Scholze, Frank, Buchholz, Christian, Salami, Zanyar, Abdulhadi, Yasser, García, Danilo Ocaña, Mentzel, Heiko, Babuschkin, Anja, Laubis, Christian, Soltwisch, Victor
Publikováno v:
In Optik February 2023 273