Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Sokolov, Evgeniy V."'
Publikováno v:
Science and Technology of Advanced Materials, Vol 13, Iss 1, p 015001 (2012)
We developed a mathematical analysis method of reflectometry data and used it to characterize the internal structure of TiO2/SiO2/Si and Ti/SiO2/Si stacks. Atomic concentration profiles of all the chemical elements composing the samples were reconstr
Externí odkaz:
https://doaj.org/article/b63beccaca9344f4967fa1c64192694a
Autor:
Romanovskii, Oleg A., Kistenev, Yurii V., Denisov, Gregory G., Malygin, Vladimir I., Glyavin, Mikhail Yu., Belousov, Vladimir I., Tsvetkov, Alexander I., Shmelev, Mikhail Yu., Eremeev, Anatoly G., Chirkov, Alexey V., Baber, Igor S., Karpov, Nikolay I., Leonov, Igor I., Kopelovich, Evgeniy A., Troitskiy, Maxim M., Kuznetsov, Mikhail V., Varygin, Ivan A., Zhurin, Konstantin A., Tai, Evgeniy M., Soluyanova, Elena A., Bakulin, Mikhail I., Sokolov, Evgeniy V., Roy, Igor N., Anashkin, Igor O., Khvostenko, Petr P., Kirneva, Natalia A.
Publikováno v:
Proceedings of SPIE; November 2020, Vol. 11582 Issue: 1 p1158216-1158216-5