Zobrazeno 1 - 2
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pro vyhledávání: '"Soichi Kumon"'
Nano-Structures Stiction Suppression by Molecular Structure Optimized Surface Energy Reduction Agent
Autor:
Hiroyasu Iimori, Soichi Kumon, Tatsuhiko Koide, Shinsuke Kimura, Yoshihiro Ogawa, Katsuhiro Sato, Tomohiko Sugita, Terui Yoshiharu, Okumura Yuzo
Publikováno v:
ECS Transactions. 80:53-60
Introduction Ceaseless scaling of semiconductor devices has caused nano-structure stiction issues during drying step of wafer cleaning. The following mechanism is considered to explain nano-structure stiction. Capillary force of remaining liquid in o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2321c44219cdd7249a4350cbeee6bf17
https://doi.org/10.1149/08002.0053ecst
https://doi.org/10.1149/08002.0053ecst
Publikováno v:
Journal of Sol-Gel Science and Technology. 19:553-557
Macroporous silicate thick films were prepared by the sol-gel dip-coating method accompanied by the phase separation using the composition of methyl-trimethoxysilane (MTMS), nitric acid and dimethylformamide (DMF). The morphology of the film varied t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ace498f3c50fa10507405751304fedb
https://doi.org/10.1023/a:1008744823927
https://doi.org/10.1023/a:1008744823927