Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Soenke Seebacher"'
Publikováno v:
Optics and Lasers in Engineering. 36:451-473
High resolution optical microscopy has many interesting applications in solid state physics, low temperature physics, biology and semiconductor technology. Unfortunately, the lateral resolution of conventional microscopes is limited by the Rayleigh-l
Publikováno v:
Optics and Lasers in Engineering. 36:103-126
Progresses in microsystem technology promise a lot of new applications in industry and research. However, the increased complexity of the microsystems demand sensitive and robust measurement techniques. Fullfield and non invasive methods are desirabl
Publikováno v:
Microsystems Engineering: Metrology and Inspection.
Digital Holography is a modern coherent-optical technique that allows the direct access to the interference phase in holographic interferometry. In contrast to conventional tactical measurement techniques digital holographic interferometry provides f
Publikováno v:
SPIE Proceedings.
Digital Holography makes it possible to reconstruct the phase distribution of wavefields directly. By application of interferometric technics the observed interference phase contains the information about the shape of the object under test and/or its
Autor:
Nikolay B. Voznesensky, Soenke Seebacher, Werner P. O. Jueptner, Wolfgang Osten, Vadim P. Veiko
Publikováno v:
SPIE Proceedings.
Scanning near field optical microscopes provide access to highly resolved optical and topographical surface properties. The resolutions that can be achieved are better than 100 nm. However, the quality of the optical fiber tip is of decisive importan
Publikováno v:
SPIE Proceedings.
Progresses in microsystem technology promise a lot of new applications in industry and research. However, the increased complexity of the microsystems demand sensitive and robust measurement techniques. Fullfield and non invasive methods are desirabl
Publikováno v:
SPIE Proceedings.
The growing development of modern microcomponents, structures and systems, makes it necessary to qualify large-scale approved measurement methods for the investigation in micro- scales. New materials and structural design are employed whose behavior
Autor:
Werner P. O. Jueptner, Vadim P. Veiko, Wolfgang Osten, Soenke Seebacher, Nikolay B. Voznesensky
Publikováno v:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99).
Scanning near field optical microscopes provide access to a variety of interesting material properties with a resolution in the nanometric size of scale. However, the quality of the optical fiber tip is of decisive importance. Because the production
Publikováno v:
Optical Engineering for Sensing and Nanotechnology (ICOSN '99).
Progresses in microsystem technology promise a lot of new applications in industry and research. However, the increased complexity of the microsystems demand sensitive and robust measurement techniques. Full-field and non invasive methods are desirab
Autor:
Werner P. O. Jueptner, Leszek Salbut, Wolfgang Osten, Soenke Seebacher, Malgorzata Kujawinska
Publikováno v:
SPIE Proceedings.
In this paper the methodology and instrumentation for the investigation of the silicon microbeam behavior under tensile and bending loads are described. The tests are performed by means of Automated Grating Interferometry (AGI) and Digital Holography