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We demonstrate an axisymmetric inverse-designed metalens to improve the performance of zone-plate-array lithography (ZPAL), one of the maskless lithography approaches, that offer a new paradigm for nanoscale research and industry. First, we derive a
Externí odkaz:
http://arxiv.org/abs/2212.06441
Publikováno v:
Nanophotonics, Vol 12, Iss 13, Pp 2371-2381 (2023)
We demonstrate an axisymmetric inverse-designed metalens to improve the performance of zone-plate-array lithography (ZPAL), one of the maskless lithography approaches, that offer a new paradigm for nanoscale research and industry. First, we derive a
Externí odkaz:
https://doaj.org/article/2b71ef6586224907a1707f8ab2832782
Akademický článek
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Autor:
Canizares, Claude R., Davis, John E., Dewey, Daniel, Flanagan, Kathryn A., Galton, Eugene B., Huenemoerder, David P., Ishibashi, Kazunori, Markert, Thomas H., Marshall, Herman L., McGuirk, Michael, Schattenburg, Mark L., Schulz, Norbert S., Smith, Henry I., Wise, Michael
Details of the design, fabrication, ground and flight calibration of the High Energy Transmission Grating, HETG, on the Chandra X-ray Observatory are presented after five years of flight experience. Specifics include the theory of phased transmission
Externí odkaz:
http://arxiv.org/abs/astro-ph/0507035
Autor:
Manfrinato, Vitor R., Cheong, Lin Lee, Duan, Huigao, Winston, Donald, Smith, Henry I., Berggren, Karl K.
Publikováno v:
In Microelectronic Engineering 2011 88(10):3070-3074
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In Microelectronic Engineering 2010 87(5):1011-1014
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In Microelectronic Engineering 2007 84(5):1454-1458
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In Microelectronic Engineering 2006 83(4):956-961
Publikováno v:
In Materials Today February 2005 8(2):26-33
Publikováno v:
In Organic Electronics 2005 6(5):211-220