Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Sivasubramaniam Nandini Devi"'
Autor:
Yee-Chia Yeo, Eng Fong Chor, Guo-Qiang Lo, Sivasubramaniam Nandini Devi, Mantavya Sinha, Rinus T. P. Lee
Publikováno v:
ECS Transactions. 19:323-330
This paper demonstrates the integration of a novel aluminum (Al) segregated NiSiGe/p+-SiGe S/D contact junction in strained tri-gate p-FinFETs for drive current enhancement. Al is introduced by ion implant into p+-SiGe S/D region followed by nickel d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::30dcf266716cbef96bcd1494b522ae0f
https://doi.org/10.1149/1.3118959
https://doi.org/10.1149/1.3118959
Autor:
Mantavya Sinha, Yee-Chia Yeo, Eng Fong Chor, Rinus T. P. Lee, Sivasubramaniam Nandini Devi, Guo-Qiang Lo
Publikováno v:
2009 International Symposium on VLSI Technology, Systems, and Applications.
This paper demonstrates the integration of Al segregated NiSi/p+-Si S/D contact junction in p-FinFETs for parasitic series resistance reduction. Al is introduced by ion implant into p+ S/D region followed by nickel deposition and silicidation. Drive
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::24317ded69407c389ebcf7b95f02c15a
https://doi.org/10.1109/vtsa.2009.5159297
https://doi.org/10.1109/vtsa.2009.5159297